Co-located gimbal-based dual stage actuation disk drive suspensions

ABSTRACT

Various embodiments concern a suspension having a DSA structure on a gimbaled flexure. The suspension comprises a loadbeam and flexure attached thereto. The flexure comprises a pair of spring arms, a tongue located between the spring arms and structurally supported by the pair of spring arms, and a pair of struts. The struts are positioned respectively between the pair of spring arms and the tongue. The longitudinal axes of the struts are offset with respect to each other. The suspension further comprises a slider and a motor mounted on the flexure. The motor has a longitudinal axis that is parallel with the axes of the struts and perpendicular to a longitudinal axis of the loadbeam. Electrical activation of the motor bends the pair of struts to move the slider.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. application Ser. No.14/026,427, filed Sep. 13, 2013, issuing as U.S. Pat. No. 8,681,456, onMar. 25, 2014, which claims the benefit of U.S. Provisional ApplicationNo. 61/700,972, filed Sep. 14, 2012, which is herein incorporated byreference in its entirety and for all purposes.

TECHNICAL FIELD

The present invention relates to disk drives and suspensions for diskdrives. In particular, the invention is a dual stage actuation (DSA)suspension.

BACKGROUND

DSA disk drive head suspensions and disk drives incorporating DSAsuspensions are generally known and commercially available. For example,DSA suspensions having an actuation structure on the baseplate or othermounting portion of the suspension, i.e., proximal to the spring orhinge region of the suspension, are described in the Okawara U.S. PatentPublication No. 2010/0067151, the Shum U.S. Patent Publication No.2012/0002329, the Fuchino U.S. Patent Publication No. 2011/0242708 andthe Imamura U.S. Pat. No. 5,764,444. DSA suspensions having actuationstructures located on the loadbeam or gimbal portions of the suspension,i.e., distal to the spring or hinge region, are also known anddisclosed, for example, in the Jurgenson U.S. Pat. No. 5,657,188, theKrinke U.S. Pat. No. 7,256,968 and the Yao U.S. Patent Publication No.2008/0144225. All of the above-identified patents and patentapplications are incorporated herein by reference in their entirety andfor all purposes.

There remains a continuing need for improved DSA suspensions. DSAsuspensions with enhanced performance capabilities are desired. Thesuspensions should be capable of being efficiently manufactured.

SUMMARY

Various embodiments concern a suspension having a dual stage actuationstructure on a gimbaled flexure. The suspension comprises a loadbeamhaving a longitudinal axis and flexure attached to the loadbeam. Theflexure comprises a pair of spring arms, a tongue located between thespring arms and structurally supported by the pair of spring arms, and apair of struts. The struts are positioned respectively between the pairof spring arms and the tongue. Each strut has a longitudinal axis. Thelongitudinal axes of the struts are parallel and offset with respect toeach other. The suspension further comprises a slider and a motormounted on the flexure. The motor has a longitudinal axis that isparallel with the axes of the struts and perpendicular to a longitudinalaxis of the loadbeam. Electrical activation of the motor bends the pairof struts to move the slider.

Various embodiments concern a suspension having a dual stage actuationstructure on a gimbaled flexure. The suspension comprises flexure whichitself comprises a pair of spring arms, a tongue located between thespring arms, and a pair of struts, the pair of struts respectivelyconnecting the pair of spring arms and the tongue. The suspensionfurther comprises a slider mounted on the tongue. The suspension furthercomprises a motor having opposite ends respectively mounted on the pairof spring arms. Electrical activation of the motor bends the pair ofstruts to move the slider. Such activation rotates the tongue while thespring arms remain relatively stationary.

Various embodiments concern a suspension having a dual stage actuationstructure on a gimbaled flexure. The flexure comprises a pair of springarms, a tongue located between the spring arms and structurallysupported by the pair of spring arms, and a pair of motor mounting pads,the motor mounting pads respectively connected to the tongue by a pairof struts. The suspension further comprises a slider and a motor havingopposite ends respectively mounted on the pair of motor mounting pads,wherein the slider is mounted on the motor and electrical activation ofthe motor bends the pair of struts and moves the slider. The tongueremains relatively stationary while the slider is moved by electricalactivation of the motor.

Further features and modifications of the various embodiments arefurther discussed herein and shown in the drawings. While multipleembodiments are disclosed, still other embodiments of the presentdisclosure will become apparent to those skilled in the art from thefollowing detailed description, which shows and describes illustrativeembodiments of this disclosure. Accordingly, the drawings and detaileddescription are to be regarded as illustrative in nature and notrestrictive.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an isometric view of the loadbeam side of a suspension havinga flexure with a dual stage actuation (DSA) structure in accordance withone embodiment of the invention.

FIG. 2 is an isometric view of the loadbeam side of the distal end ofthe suspension shown in FIG. 1.

FIG. 3 is an isometric view of the flexure side (i.e., the side oppositethat shown in FIG. 2) of the distal end of the suspension shown in FIG.1.

FIG. 4A is an isometric view of the stainless steel side of the flexureshown in FIG. 1.

FIG. 4B is the view of FIG. 4A but with the piezoelectric motor removed.

FIG. 5A is an isometric view of the trace side (i.e., the side oppositethat shown in FIG. 4A) of the flexure shown in FIG. 1.

FIG. 5B is the view of FIG. 5A but with the head slider removed.

FIG. 5C is the view of FIG. 5B but with the polyimide coverlay removed.

FIG. 5D is the view of FIG. 5C but with the conductive material layerremoved.

FIG. 5E is the view of FIG. 5D but with the dielectric material layerremoved.

FIG. 5F is the view of FIG. 5E but with the piezoelectric motor removed.

FIG. 6 is a side view of the distal end of the suspension shown in FIG.1.

FIG. 7 is a closer view of the portion of FIG. 6 showing the dimple,motor, and head slider.

FIGS. 8A-8C are overhead views of the stainless steel side of theflexure shown in FIG. 1, illustrating the operation of the DSAstructure.

FIG. 9 is an isometric view of the loadbeam side of a suspension havinga flexure with a dual stage actuation (DSA) structure in accordance witha second embodiment (trace side version) of the invention.

FIG. 10 is an isometric view of the loadbeam side of the distal end ofthe suspension shown in FIG. 9.

FIG. 11 is an isometric view of the flexure side (i.e., the sideopposite that shown in FIG. 10) of the distal end of the suspensionshown in FIG. 9.

FIG. 12 is an isometric view of the stainless steel side of the flexureshown in FIG. 9.

FIG. 13A is an isometric view of the trace side (i.e., the side oppositethat shown in FIG. 12) of the flexure shown in FIG. 9.

FIG. 13B is the view of FIG. 13A but with the head slider removed.

FIG. 13C is the view of FIG. 13B but with the motor removed.

FIG. 13D is the view g of FIG. 13C but with the coverlay removed.

FIG. 13E is the view of FIG. 13D but with the conductive material layerremoved.

FIG. 13F is the view of FIG. 13E but with the dielectric material layerremoved.

FIG. 14 is a side view of the distal end of the suspension shown in FIG.9.

FIG. 15 is a closer view of the portion of FIG. 14 showing the dimple,motor, and head slider.

FIGS. 16A ₁, 16B₁, and 16C₁ are overhead views of the stainless steelside of the flexure shown in FIG. 9.

FIGS. 16A ₂, 16B₂, and 16C₂ are overhead views of the trace side of theflexure shown in FIGS. 16A ₁, 16B₁, and 16C₁, respectively.

FIG. 17 is an isometric view of a tri-stage actuated suspension inaccordance with various embodiments of the invention.

FIG. 18 is an isometric view of a suspension in accordance with anotherembodiment of the invention.

FIG. 19 is an isometric view of the flexure and DSA structure of thesuspension of FIG. 18.

FIG. 20 is an isometric view of the flexure from the suspension of FIG.18.

FIG. 21 is an isometric view of the flexure and DSA structure of FIG.19.

FIG. 22 is an isometric view of the flexure of FIG. 19.

FIG. 23 is an isometric view of the flexure of FIG. 19.

FIG. 24 is an isometric view of the flexure of FIG. 19.

FIG. 25 is an isometric view of the spring metal layer of the flexure ofFIG. 19.

FIG. 26 is a side view of the suspension of FIG. 18.

FIG. 27 is a detailed view of the motor mounting of the suspension ofFIG. 18.

FIG. 28 is a front view of the flexure of FIG. 19.

FIGS. 29A-C are isometric views of the flexure of FIG. 19 in differentmovement states.

FIG. 30 is an overhead view of a flexure that can be used in asuspension.

FIGS. 31A-C are overhead views of the flexure of FIG. 30 in differentmovement states.

While the subject matter of this disclosure is amenable to variousmodifications and alternative forms, specific embodiments have beenshown by way of example in the drawings and are described in detailbelow. The intention, however, is not to limit this disclosure to theparticular embodiments described. On the contrary, this disclosure isintended to cover all modifications, equivalents, and alternativesfalling within the scope of this disclosure as defined by the appendedclaims.

DESCRIPTION OF THE INVENTION

FIG. 1 is an isometric view of the loadbeam side of a suspension 10having a flexure 12 with a co-located or gimbal-based dual stageactuation (DSA) structure 14 in accordance with a first embodiment ofthe invention (i.e., a stainless steel side version). FIG. 2 is adetailed isometric view of the distal end of the suspension 10. FIG. 3is a detailed isometric view of the flexure side of the distal end ofthe suspension 10, which shows the side opposite that shown in FIG. 2.As shown in FIG. 1, the suspension 10 includes a baseplate 16 as aproximal mounting structure. As further shown in FIG. 1, the suspension10 includes a loadbeam 18 having a rigid or beam region 20 coupled tothe baseplate 16 along a spring or hinge region 22. The loadbeam 18 canbe formed from stainless steel.

Flexure 12 includes a gimbal 24 at the distal end of the flexure 12. ADSA structure 14 is located on the gimbal 24, adjacent the distal end ofthe loadbeam 18. As best shown in FIG. 2, the suspension 10 includes agimbal limiter 26 comprising a tab 28 configured to engage a stopportion 30 of the loadbeam 18. A head slider 32 is mounted to a slidermounting region or tongue 33 of the gimbal 24, on the side of thesuspension 10 that is opposite the loadbeam 18. DSA structure 14includes a motor 34, which is a PZT or other piezoelectric actuator inthe illustrated embodiment, mounted to the gimbal 24 of the flexure 12between the load beam 18 and the head slider 32. As described in greaterdetail below, in response to electrical drive signals applied to themotor 34, the motor drives portions of the gimbal 24, including thetongue 33 and slider 32, about a generally transverse tracking axis.

FIGS. 4A and 4B are isometric views of the stainless steel side of theflexure 12 and DSA structure 14 shown in FIG. 1. The motor 34 is notshown in FIG. 4B to show further details of the tongue 33. FIGS. 5A-5Fare isometric views of the trace side (i.e., the side opposite thatshown in FIGS. 4A and 4B) of the flexure 12 and DSA structure 14.Specifically, FIGS. 5A-5F show the various layers that comprise theflexure 12 and DSA structure 14. FIG. 5B is the drawing of FIG. 5A butwith the head slider 32 removed to further show details of the tongue33. FIG. 5C is the drawing of FIG. 5B but with a polyimide coverlay 46removed to reveal a conductive material layer 44 including traces 60 andother structures formed in the conductive material layer that isotherwise underneath the polyimide coverlay 46. FIG. 5D is the drawingof FIG. 5C but with the conductive material layer 44 removed to morefully reveal the dielectric layer 42 that is otherwise underneath theconductive material layer 44. FIG. 5E is the drawing of FIG. 5D but withthe dielectric material layer 42 removed to show only the stainlesssteel layer 40 and the motor 34. FIG. 5F is the drawing of FIG. 5E butwith the motor 34 removed to illustrate only the stainless steel layer40 of the flexure 12. It will be understood that the stainless steellayer 40 could alternatively be formed from another metal or rigidmaterial.

As shown in FIGS. 5A-5F, the flexure 12 is formed from overlaying springmetal such as stainless steel layer 40, polyimide or other dielectriclayer 42, copper or other conductive material layer 44 and polyimidecoverlay 46. The dielectric layer 42 generally electrically isolatesstructures formed in the conductive material layer 44 from adjacentportions of the stainless steel layer 40. Coverlay 46 generally coversand protects the structures formed in the conductive material layer 44.The gimbal 24 includes base portion 50, spring arms 52, and mountingportion 54 formed in the stainless steel layer 40. The spring arms 52extend from the base portion 50. The mounting portion 54, which is partof the tongue 33, is supported between the spring arms 52 by a pair ofstruts 56 that extend from support regions 58 on the distal end portionsof the spring arms 52. In some embodiments, the pair of struts 56 is theonly part of the stainless steel layer 40 that connects or otherwisesupports the tongue 33 between the spring arms 52. Specifically, thestruts 56 can be the only structural linkage between the spring arms 52and the tongue 33. Also, the struts 56, in connecting with the tongue33, can be the only part of the stainless steel layer 40 that connectsbetween the spring arms 52 distal of the base portion 50. As shown, thestruts 56 are offset from one another with respect to the longitudinalaxis of the flexure 12 or otherwise configured so as to provide forrotational movement of the mounting portion 54 about the tracking axiswith respect to the spring arms 52. As best shown in FIG. 8B (furtherdiscussed herein), one strut 56 of the pair of struts 56 is locatedproximally of the motor 34 while the other strut 56 of the pair ofstruts 56 is located distally of the motor 34 such that the motor 34 isbetween the pair of struts 56. Each strut 56 has a longitudinal axisthat extends generally perpendicular with respect to the longitudinalaxis of the suspension 10. The longitudinal axes of the struts 56 extendparallel but do not intersect or otherwise overlap with each other whenthe struts 56 are not stressed (e.g., not bent). As shown in FIG. 5F,the struts 56 can each be the narrowest part of the stainless steellayer 40 in an X-Y plane (as viewed from the overhead perspective ofFIG. 8B) while the thickness of the stainless steel layer 40 can beconsistent along the flexure 12.

As perhaps best shown in FIGS. 4A and 5E, the opposite ends of the motor34 are attached (e.g., by structural adhesive such as epoxy) to thesupport regions 58 of the spring arms 52. In this way, the supportregions 58 can serve as motor mounting pads. Portions of the dielectriclayer 42 extend underneath the struts 56 in FIG. 4B. As shown in FIG.5C, a plurality of traces 60 formed in the conductive material layer 44extend between the base portion 50 and the tongue 33 over supportingportions 62 formed in the dielectric layer 42. A number of the traces 60terminate at locations on a distal region on the tongue 33 and areconfigured to be electrically attached to terminals of the read/writehead (not shown) on the slider 32. Other traces 60 terminate at acontact such as copper pad 64 on the tongue 33, below the motor 34. Inthe illustrated embodiment, the copper pad 64 is located generallycentrally between the spring arms 52. As perhaps best shown in FIG. 4B,the dielectric layer 42 has an opening over the pad 64. A structural andelectrical connection, e.g., using conductive adhesive, is made betweenthe copper pad 64 and an electrical terminal on the motor 34. Anotherelectrical connection to a terminal on the motor 34 (e.g., a groundterminal) is made through the dimple 36 (i.e., the dimple 36 is inelectrical contact with the terminal on the motor 34). In otherembodiments, the electrical connections to the motor 34 can be made byother approaches and structures.

As shown in FIGS. 5A and 5B, the slider 32 sits on the coverlay 46 ofthe tongue 33. Coverlay 46 provides protection for the traces 60. Asshown in FIGS. 5A-5C, which show that the supporting portions 62 areoffset with respect to the longitudinal direction of the flexure 12,portions of the traces 60 on the opposite sides of the flexure 12 areoffset from each other in a manner similar to that of the struts 56(e.g., portions of the traces overlay the struts in the illustratedembodiment). Offset traces of this type can increase the strokeperformance of the DSA structure 14. Other embodiments of the invention(not shown) do not have offset traces. It is noted that, in someembodiments, the supporting portions 62 may provide negligiblemechanical support to the tongue 33 relative to the struts 56.

FIGS. 6 and 7 are side views of the suspension 10, illustrating thegimbal 24 and DSA structure 14. As shown, the dimple 36, which is astructure formed in the stainless steel material that forms the loadbeam18, and which extends from the loadbeam 18, engages the motor 34 andfunctions as a load point by urging the portion of the gimbal 24 towhich the motor 34 is connected out of plane with respect to the baseportion 50 of the flexure 12. A bend or transition in the flexure 12 canoccur at any desired location along the spring arms 52 due to the urgingof the gimbal 24 by the dimple 36. The dimple 36 can also provide anelectrical contact to a terminal (not visible) on the portion of themotor 34 engaged by the dimple. For example, if the stainless steelloadbeam 18 is electrically grounded or otherwise part of an electricalcircuit, the dimple 36 can provide an electrical ground potential orelectrical connection to the terminal on the motor 34. Other embodimentsof the invention (not shown) include other dimple structures such asplated structures that provide these functions. The dimple 36 can beplated with conductive material such as gold to enhance the electricalconnection to the terminal of the motor 34 which can also be plated withconductive material such as gold. Still other embodiments (not shown)use structures other than the dimple 36 to provide a grounding or otherelectrical connection to the motor 34. In one such embodiment, forexample, there is another copper pad on the end of one of the supportregions 58, and an electrical connection (e.g., a ground connection) canbe made by a structure such as conductive adhesive between a terminal onthe motor 34 and the conductive material pad on the support region ofthe flexure 12. In some embodiments, the motor 34 is structurallyattached to the tongue 33 at a location between the opposite lateral endportions of the tongue 33. In such embodiments, the motor 34 is attachedto the tongue 33 of the gimbal 24 in addition to the motor 34 beingattached to the support regions 58 of the spring arms 52.

The operation of DSA structure 14 can be described with reference toFIGS. 8A-8C that are plan views of the stainless steel side of thegimbal 24 of the flexure 12. As shown in FIG. 8B, the DSA structure 14and tongue 33 are in a neutral, undriven state with the tongue 33generally centrally located between the spring arms 52 when no trackingdrive signal is applied to the motor 34. As shown in FIG. 8A, when afirst potential (e.g., positive) tracking drive signal is applied to themotor 34, the shape of the motor changes and its length generallyexpands. This change in shape increases the distance between the supportregions 58 as shown in FIG. 8A, which in connection with the mechanicalaction of the linking struts 56, causes the tongue 33 to move or rotatein a first direction with respect to the spring arms 52 about thetracking axis. As shown, the lengthening of the motor 34 stretches thegimbal 24 laterally and causes the struts 56 to bend (e.g., bow inward).Because of the offset arrangement of the struts 56, the struts 56 bendsuch that the tongue 33 rotates in the first direction.

As shown in FIG. 8C, when a second potential (e.g., negative) trackingdrive signal is applied to the motor 34, the shape of the motor changesand its length generally contracts. This change in shape decreases thedistance between the support regions 58 as shown in FIG. 8C, which inconnection with the mechanical action of the linking struts 56, causesthe tongue 33 to move or rotate in a second direction with respect tothe spring arms 52 about the tracking axis. The second direction isopposite the first direction. As shown, the shortening of the motor 34compresses the gimbal 24 laterally and causes the struts 56 to bend(e.g., bow outward). Because of the offset arrangement of the struts 56,the struts 56 bend such that the tongue 33 rotates in the seconddirection. Some, although relatively little, out-of-plane motion ofother portions of the gimbal 24 is produced during the tracking actionof DSA structure 14 as described above. With this embodiment of theinvention the, flexure slider mounting region on the tongue 33 generallyrotates with respect to the spring arms 52 as the spring arms 52 staystationary or experience little movement.

FIG. 9 is an isometric view of the loadbeam-side of a suspension 110having a flexure 112 with a co-located or gimbal-based dual stageactuation (DSA) structure 114 in accordance with a second embodiment ofthe invention (i.e., a trace side version). The components of thesuspension 110 can be configured similarly to the previously discussedsuspension 10 unless otherwise described or illustrated. FIG. 10 is anisometric view of the distal end of the suspension 110. FIG. 11 is anisometric view of the flexure-side of the distal end of the suspension110, showing the side opposite that shown in FIG. 10. As shown in FIG.10, the suspension 110 includes a baseplate 116 as a proximal mountingstructure. As further shown in FIG. 11, the suspension 110 includes aloadbeam 118 having a rigid or beam region 20 coupled to the baseplate116 along a spring or hinge region 122. The loadbeam 18 can be formedfrom stainless steel. Flexure 112 includes a gimbal 124 at its distalend. A DSA structure 114 is located on the gimbal 124, adjacent thedistal end of the loadbeam 118. The illustrated embodiment of thesuspension 110 also includes a gimbal limiter 126 comprising a tab 128configured to engage a stop portion 130 of the loadbeam 118. The DSAstructure 114 includes a motor 134, which is a PZT actuator in theillustrated embodiment, mounted to a motor mounting region of the tongue133, on the side of the flexure 112 opposite the loadbeam 118. A headslider 132 is mounted to the side of the motor 134 opposite the flexure112. As described in greater detail below, in response to electricaldrive signals applied to the motor 134, the motor drives portions of thegimbal 124, including portions of the tongue 133, motor 134 and slider132, about a generally transverse tracking axis.

FIG. 12 is a detailed isometric view of the stainless steel-side of theflexure 112 and DSA structure 14 shown in FIG. 9. FIGS. 13A-13F areisometric views of the flexure 112 and DSA structure 114 showing theside opposite that shown in FIG. 12. Specifically, FIGS. 13A-13F showthe various layers that comprise the flexure 112 and DSA structure 114.FIG. 13B is the drawing of FIG. 13A but with the head slider 132 removedto further show details of the motor 134 on the tongue 133. FIG. 13C isthe drawing of FIG. 13B but with the motor 134 removed to reveal detailsof the tongue 133. FIG. 13D is the drawing of FIG. 13C but with thecoverlay 146 removed to reveal a conductive material layer 144 includingtraces 160 and other structures formed in the conductive material layer144. FIG. 13E is the drawing of FIG. 13D but with the conductivematerial layer 144 removed to further reveal the dielectric layer 142.FIG. 13F is the drawing of FIG. 13E but with the dielectric layer 142removed to show only the stainless steel layer 140 of the flexure 112.It will be understood that the stainless steel layer 140 couldalternatively be formed from another metal or rigid material. As shown,the flexure 112 is formed from overlaying spring metal such as stainlesssteel layer 140, polyimide or other dielectric layer 142, copper orother conductive material layer 144, and coverlay 146. The dielectriclayer 142 generally electrically isolates structures formed in theconductive material layer 144 from adjacent portions of the stainlesssteel layer 140. Coverlay 146 generally covers and protects thestructures formed in the conductive material layer 144.

The gimbal 124 includes base portion 150, spring arms 152, and centerregion 154 of the tongue 133. The base portion 150, the spring arms 152,and the center region 154 are each formed from the stainless steel layer140. The spring arms 152 extend from the base portion 150. The centerregion 154, which is a center part of the tongue 133, is connected tothe distal ends of the spring arms 152 and is supported between thespring arms 152. Also formed in the stainless steel layer 140 is a pairof struts 153. Each of the struts 153 extends from one of the oppositelateral sides of the center region 154 and has a motor mounting flag orpad 155 on its outer end. As shown, the struts 153 are offset from oneanother with respect to the longitudinal axis of the flexure 112 orotherwise configured so as to provide for rotational movement of themotor 134 and the head slider 132 mounted thereto about the trackingaxis with respect to the center region 154. Each strut 153 comprises alongitudinal axis that extends generally perpendicular with respect tothe longitudinal axis of the suspension 110. The longitudinal axes ofthe struts 153 extend parallel but do not intersect or otherwise overlapwith each other when the struts 153 are not stressed (e.g., not bent).The struts 153 can be the only structural linkage between the centerregion 154 and the pads 155 (e.g., the only part of the stainless steellayer 140 connecting the center region 154 with the pads 155 is thestruts 153, a single strut 153 for each pad 155). As shown in FIG. 13F,the struts 153 can each be the narrowest part of the stainless steellayer 140 in an X-Y plane (as viewed from the overhead perspective ofFIG. 16B ₁) while the thickness of the stainless steel layer 140 can beconsistent along the flexure 112.

As shown in FIG. 13D, a plurality of traces 160 are formed in theconductive material layer 144 and extend between the base portion 150and tongue 133 along paths generally laterally outside the spring arms152 and over supporting portions 162 formed in the dielectric layer 142.A number of the traces 160 terminate at locations adjacent the distalregion of the tongue 133 and are configured to be electrically attachedto read/write head terminals (not shown) on the slider 132. A pair ofpower traces 161 for powering the motor 134 are also formed in theconductive material layer 144, and extend between the base portion 150and a proximal portion of the tongue 133 along paths generally insidethe spring arms 152 and over supporting portions 163 formed in thedielectric layer 142. The motor power traces 161 terminate at a firstmotor terminal pad 167 on one of the motor mounting pads 155. A secondmotor terminal pad 169 is formed in the conductive material layer 144 onthe other motor mounting pad 155, and is coupled by a trace 171 to aconductive via 173 that is shown on the tongue 133 at a location betweenthe motor mounting pads 155. As best viewed in FIG. 13D, via 173 extendsthrough an opening 175 in the dielectric layer 142 (shown in FIG. 13E)to electrically contact the stainless steel layer 140 of the flexure112. The motor terminal pad 169 can be electrically connected to aground potential at the stainless steel layer 140 by the trace 171 andthe via 173. As shown in FIG. 12, structures such as tabs 157 in thestainless steel layer 140 are formed out of the plane of the stainlesssteel layer and engage the distal portion of the trace supportingportions 162 to push the terminal ends of the traces 161 down so theterminals on the slider 132 can be correctly electrically attached(e.g., by solder bonds) to the traces while accommodating the thicknessof the motor 134. FIG. 13E also illustrates other holes in thedielectric layer that can be used in connection with conductive vias toelectrically connect (e.g., ground) traces and other structures in theconductive material layer 144 to the stainless steel layer 140. In otherembodiments, other approaches and structures can be used to couple thetracking drive signals to the terminals on the motor 134.

The electrical terminals on the motor 134 may be on the same side (e.g.,top or bottom) but opposite longitudinal ends of the motor 134. As shownin FIGS. 13B and 13C, the motor 134 can be attached to the gimbal 124 bybonding the electrical terminals of the motor 134 to the motor terminalpads 167 and 169 using conductive adhesive. By this approach, the motor134 is both structurally and electrically connected to the gimbal 124.As shown in FIG. 13C, the motor terminal pads 167 and 169 are exposedthrough openings in the coverlay 146 to provide access for theconductive adhesive.

FIGS. 14 and 15 are side views of the suspension 110, illustrating thegimbal 124 and DSA structure 114. As shown, the dimple 136, which is astructure formed in the stainless steel of the loadbeam 118 and whichprojects from the loadbeam 118, engages the center region 154 ofstainless steel layer 140 on the side of the tongue 133 opposite themotor 134. Dimple 136 functions as a load point by urging the portion ofthe gimbal 124 to which the motor 134 is connected out of plane withrespect to the base portion 150 of the flexure 112. In the illustratedembodiment, the motor 134 is located between the tongue 133 and the headslider 132 (e.g., the motor 134 is sandwiched in a vertical axis). Asshown in FIGS. 14 and 15, the slider 132 is structurally supported bythe motor 134 such that the only structural linkage between the flexure112 and the slider 132 runs through or otherwise includes the motor 134.The manner by which the stainless steel tabs 157 locate the portion ofdielectric layer 142 with the terminal ends of the traces 160 at thecorrect z-height and adjacent to the portion of the head slider 132 thatincludes the read/write head terminals is shown in FIG. 15.

The operation of DSA structure 114 can be described with reference toFIGS. 16A ₁, 16A₂, 16B₁, 16B₂, 16C₁ and 16C₂ that are plan views of thegimbal 124 of the flexure 112. FIGS. 16A ₁, 16B₁ and 16C₁ illustrate thestainless steel side of the flexure 112, and FIGS. 16A ₂, 16B₂ and 16C₂illustrate the trace side of the flexure 112, with the motor 134 andhead slider 132 shown. As shown in FIGS. 16B ₁ and 16B₂, the DSAstructure 114 and tongue 133, as well as the motor 134 on the linkageformed by the motor mounting pads 155 and struts 153, are in a neutral,undriven state with the head slider positioned generally parallel to thelongitudinal axis of the flexure 112 when no tracking drive signal isapplied to the motor 134. The struts 153 are not bent or otherwisestressed in this state. As shown in FIGS. 16A ₁ and 16A₂, when a firstpotential (e.g., positive) tracking drive signal is applied to the motor134, the shape of the motor changes and its length generally expands.This change in shape increases the distance between the motor mountingpads 155, which in connection with the mechanical action of the linkingstruts 153, causes the motor 134, and therefore the head slider 132mounted thereto, to move or rotate in a first direction with respect tothe longitudinal axis of the flexure 112 about the tracking axis. Asshown, the lengthening of the motor 134 stretches the struts 153laterally and causes the struts 153 to bend (e.g., bow inward). Becauseof the offset arrangement of the struts 153, the struts 153 bend suchthat the motor 134 and the head slider 132 rotate in the firstdirection.

As shown in FIGS. 16C ₁ and 16C₂, when a second potential (e.g.,negative) tracking drive signal is applied to the motor 134, the shapeof the motor changes and its length generally contracts. This change inshape decreases the distance between the motor mounting pads 155, whichin connection with the mechanical action of the linkage including struts153, causes the motor 134, and therefore the head slider 132 mountedthereto, to move or rotate in a second direction with respect to thelongitudinal axis of the flexure 112 about the tracking axis. The seconddirection is opposite the first direction. As shown, the shortening ofthe motor 134 compresses the struts 153 laterally and causes the struts153 to bend (e.g., bow outward). Because of the offset arrangement ofthe struts 153, the struts 153 bend such that the motor 134 and the headslider 132 rotate in the second direction.

Some, although relatively little, out-of-plane motion of other portionsof the gimbal 124 may be produced during the tracking action of DSAstructure 114. The linkage provided by the struts 153 accommodates themotion of the motor 134 so the remaining portions of the tongue 133remain generally aligned with respect to the longitudinal axis of theflexure 112 during this tracking action. For example, the motor 134 andslider 132 rotate, but the center region 154 (or more broadly the tongue133) does not rotate or rotates only an insignificant or trivial amount.

FIG. 17 is an illustration of a suspension 210 in accordance withanother embodiment of the invention. As shown, the suspension 210includes a co-located or gimbal-based DSA structure 214 and a loadbeamor baseplate-type DSA structure 290. In this way, the suspension 210 isa tri-stage actuated suspension. In one embodiment, the DSA structure214 is substantially the same as the DSA structure 114 described above(e.g., is configured with any aspect described or shown in connectionwith FIGS. 9-16C ₂) except as otherwise specified or shown. In anotherembodiment, the DSA structure 214 is substantially the same as the DSAstructure 14 described above (e.g., is configured with any aspectdescribed or shown in connection with FIGS. 1-8C) except as otherwisespecified or shown. Other embodiments of suspension 210 include othergimbal-based DSA structures. The DSA structure 290 can be any known orconventional DSA structure such as any of those described above in thebackground section.

FIG. 18 is a detailed isometric view of a co-located or gimbal-based DSAstructure 314 on the distal end of a suspension 310. The suspension 310can be configured similarly to the previously discussed suspension 10unless otherwise described or illustrated. For example, the proximal end(not illustrated) of the suspension 310 can be configured similarly tothe proximal end of the previously described suspension 10.

Flexure 312 includes a gimbal 324 at the distal end of the flexure 312.A DSA structure 314 is located on the gimbal 324, adjacent the distalend of the loadbeam 318. The suspension 310 includes a gimbal limiter326 comprising a tab 328 configured to engage a stop portion 330 of theloadbeam 318. A head slider 332 is mounted to a slider mounting regionor tongue 333 of the gimbal 324, on the side of the suspension 310 thatis opposite the loadbeam 318. DSA structure 314 includes a motor 334,which is a PZT or other piezoelectric actuator in the illustratedembodiment, mounted to the gimbal 324 of the flexure 312 between theloadbeam 318 and the head slider 332. As described in greater detailbelow, in response to electrical drive signals applied to the motor 334,the motor 334 drives portions of the gimbal 324, including the tongue333 and slider 332, about a generally transverse tracking axis.

FIG. 19 is an isometric view of the stainless steel side of the flexure312 and DSA structure 314 shown in FIG. 18. As shown, a stiffener 339 ismounted on the motor 334. The stiffener 339 is an asymmetric stiffener.Any type of stiffener or other component or configuration referenced inU.S. provisional patent application 61/711,988, filed Oct. 10, 2012,which is hereby incorporated by reference herein in its entirety, can beused in any embodiment of the present disclosure. It is noted that someembodiments may not include the stiffener 339. FIG. 19 further showselectrical connectors 345 connecting with respective anode and cathodeterminals of the motor 334. The electrical connectors 345 can connectwith respective traces of the flexible circuit 349. The flexible circuit349 can be configured similarly to the layering of the dielectric layer42, the traces 60 of conductive material layer 44, and the coverlay 46of the previously described suspension 10.

FIG. 20 is an isometric view of the opposite side of the flexure 312 andwithout the slider 332 with respect to the view of FIG. 19. FIGS. 21-25are isometric views of the flexure 312 and DSA structure 314.Specifically, FIGS. 21-25 show the various layers that comprise theflexure 312 and DSA structure 314. FIG. 21 is the drawing of FIG. 19 butwith a stiffener 339 removed from the motor 334. As shown in FIG. 21,the motor 334 includes a non-conductive section 338 on the motor 334which can isolate the anode and cathode terminals of the motor 334. FIG.22 is the drawing of FIG. 19 but with the motor 334 removed to furthershow details of the tongue 333. FIG. 22 shows the pair of struts 356. Asshown in FIG. 22, the suspension 310 includes a motor pad 341 on thestainless steel layer 340. The motor pad 341 can be a viscoelasticmaterial, and may further be adhesive to attach to the tongue 333 and/orthe motor 334. The motor pad 341 can dampen vibration. The motor pad 341or other damper can be configured as described in U.S. provisionalpatent application 61/711,988, filed Oct. 10, 2012, previouslyincorporated herein. FIG. 22 further shows two strips of adhesive 343.The adhesive 343 can be a non-conductive adhesive such as epoxy. Asshown, the strips of adhesive 343 are placed on the spring arms 352 ofthe stainless steel layer 340. The strips of adhesive 343 can attach themotor 334 to the pair of spring arms 352. FIG. 23 is the drawing of FIG.22 but with the electrical connectors 345 removed to reveal theconductive pads 347 respectively positioned on the spring arms 352. Theelectrical connectors 345 can comprise solder, conductive epoxy (e.g.,silver filled), or other material for forming an electrode connection.The electrical connectors 345 can electrically connect with respectiveanode and cathode terminals of the motor 334. The conductive pads 347can comprise copper surfaces on a dielectric layer. The conductive pads347 can electrically connect with respective circuits of the flexiblecircuit 349 for controlling an electrical signal applied across themotor 334.

FIG. 24 is the drawing of FIG. 23 but with the motor pad 341 and thestrips of adhesive 343 removed. FIG. 25 shows only the stainless steellayer 340. As shown in FIG. 25, the stainless steel layer 340 forms thespring arms 352, the struts 356, and the tongue 333. The pair of struts356 is the only part of the stainless steel layer 340 that connects orotherwise supports the tongue 333 between the spring arms 352.Specifically, the struts 356 can be the only structural linkage betweenthe spring arms 352 and the tongue 333. Also, the struts 356, inconnecting with the tongue 333, can be the only part of the stainlesssteel layer 340 that connects between the spring arms 352 distal of thebase portion 350. As shown, the struts 356 are offset from one anotherwith respect to the longitudinal axis of the flexure 312 or otherwiseconfigured so as to provide for rotational movement of the tongue 333about the tracking axis with respect to the spring arms 352. As bestshown in FIG. 22, one strut 356 of the pair of struts 356 is locatedproximally of the motor 334 while the other of the pair of struts 356 islocated distally of the motor 334 such that the motor 334 is between thepair of struts 356. Each strut 356 has a longitudinal axis that extendsgenerally perpendicular with the longitudinal axis of the suspension310. The longitudinal axes of the struts 356 extend parallel but do notintersect or otherwise overlap with each other when the struts 356 arenot stressed (e.g., not bent). As shown in FIG. 25, the struts 356 caneach be the narrowest part of the stainless steel layer 340 in an X-Yplane while the thickness of the stainless steel layer 340 can beconsistent along the flexure 312.

FIG. 26 is a side view of the suspension 310, illustrating the gimbal324 and DSA structure 314. As shown, the dimple 36, which is a structureformed in the stainless steel of the loadbeam 318 and which extends fromthe loadbeam 318, engages the stiffener 339 or, alternatively, the motor334, and functions as a load point by urging the portion of the gimbal324 to which the motor 334 is connected out of plane with respect to thebase portion 350 of the flexure 312. A bend or transition in the flexure312 can occur at any desired location along the spring arms 352 due tothe urging of the gimbal 324 by the dimple 336. In some embodiments, themotor 334 is structurally attached to the tongue 333 at a locationbetween the opposite lateral end portions of the tongue 333. In suchembodiments, the motor 334 can be attached to the tongue 333 in additionto the motor 334 being attached to the spring arms 352. In some otherembodiments, the motor 334 is attached to the spring arms 352 but is notattached to the tongue 333 to allow the motor 334 to move relative tothe tongue 333.

FIG. 27 shows a detailed view of the motor 334 mounted on the flexure312. As shown, the electrical connectors 345 are bonded to theconductive pads 347 and wrap around to the top of the motor 334 tomechanically and electrically connect with terminals of the motor 334.FIG. 28 shows a front view of the flexure 312 which further shows theelectrical connectors 345 wrapping around to the top of the motor 334.As shown in FIG. 28, the stiffener comprises a top layer 348 and abottom layer 351. The top layer 348 can comprises a layer of metalmaterial, such as stainless steel. The bottom layer 351 can comprises anadhesive, the adhesive separating and coupling the top layer 348 and thetop side of the motor 334.

The operation of DSA structure 314 can be described with reference toFIGS. 29A-29C, each showing an overhead view of the flexure 312 duringsome stage of activation or non-activation of the motor 334. As shown inFIG. 29B, the DSA structure 314 and tongue 333 are in a neutral,undriven state with the tongue 333 generally centrally located betweenthe spring arms 352 when no tracking drive signal is applied to themotor 334. As shown in FIG. 29A, when a first potential (e.g., positive)tracking drive signal is applied to the motor 334, the shape of themotor changes and its length generally expands. This change in shape, inconnection with the mechanical action of the linkage including struts356, causes the tongue 333 to move or rotate in a first direction withrespect to the spring arms 352 about the tracking axis. As shown, thelengthening of the motor 334 stretches the gimbal 324 laterally andcauses the struts 356 to bend (e.g., bow inward). Because of the offsetarrangement of the struts 356, the struts 356 bend such that the tongue333 rotates in the first direction.

As shown in FIG. 29C, when a second potential (e.g., negative) trackingdrive signal is applied to the motor 334, the shape of the motor changesand its length generally contracts. This change in shape, in connectionwith the mechanical action of the linking struts 356, causes the tongue333 to move or rotate in a second direction with respect to the springarms 352 about the tracking axis. The second direction is opposite thefirst direction. As shown, the shortening of the motor 334 compressesthe gimbal 324 laterally and causes the struts 356 to bend (e.g., bowoutward). Because of the offset arrangement of the struts 356, thestruts 356 bend such that the tongue 333 rotates in the seconddirection. Some, although relatively little, out-of-plane motion ofother portions of the gimbal 324 may be produced during the trackingaction of DSA structure 314 as described above. With this embodiment ofthe invention, the flexure slider mounting region on the tongue 333generally rotates with respect to the spring arms 352 as the spring arms352 stay stationary or experience little movement.

FIG. 30 shows an overhead view of a flexure 412. The flexure 412 can beembodied in the suspension 10 of FIGS. 1-8C or other suspension. Theflexure 412 can be configured similarly to the flexure 12 of FIGS. 1-8Cexcept as otherwise described or shown. FIGS. 31A-C are overhead viewsof the stainless steel side of the gimbal 424 of the flexure 412 shownin different movement states and without a motor 434 to reveal furtheraspects of the flexure 412. The flexure 412 includes a base portion 450and spring arms 452 branching therefrom. The spring arms 452 includesupport regions 458, which can respectively serve as motor mountingpads. As shown in FIG. 30, a motor 434 is mounted on the flexure 412.Specifically, opposite longitudinal ends of the motor 434 are mounted onthe support regions 458. Adhesive can be used to mount the motor 434 asdescribed herein. A slider (not shown) can be mounted to the tongue 433in any manner referenced herein, such as similarly to the embodiment ofFIGS. 1-8C. For example, the slider can be located on the opposite sideof the flexure 412 with respect to the motor 434.

As shown in FIG. 31A, the tongue 433 is connected to the spring arms 452(specifically the support regions 458) by a pair of struts 456. Thetongue 433, struts 456, spring arms 452, and base portion 450 can beformed from a stainless steel layer 440 (or other type of metal). Theflexure 412 includes a gimbal 424 which can function as other gimbalsdiscussed herein. While the flexure 12 of FIGS. 1-8C show struts 56having respective longitudinal axes that are parallel with each otherand parallel with a longitudinal axis of the motor 34, the struts 456 ofthe flexure 412 have respective longitudinal axes that are parallel withrespect to each other but that are not parallel with respect to thelongitudinal axis of the motor 434. In yet another embodiment, a flexurecan be similar to that shown in FIG. 31A except that the longitudinalaxes of the struts of the flexure do not extend parallel with respect toeach other and neither of the longitudinal axes of the struts extendparallel with the longitudinal axis of the motor. Returning to theembodiment of FIG. 31A, the pair of struts 456 is the only part of thestainless steel layer 440 that connects or otherwise structurallysupports the tongue 433 between the spring arms 452. Specifically, thestruts 456 can be the only structural linkage between the spring arms452 and the tongue 433. Also, the struts 456, in connecting with thetongue 433, can be the only part of the stainless steel layer 440 thatconnects between the spring arms 452 distal of the base portion 450.

The operation of the DSA structure of the flexure 412 can be describedwith reference to FIGS. 31A-C. As shown in FIG. 31A, the tongue 433 isin a neutral, undriven state with the tongue 433 generally centrallylocated between the spring arms 452 when no tracking drive signal isapplied to the motor 434 (shown in FIG. 30 but not shown in FIGS.31A-C). When a first potential (e.g., positive) tracking drive signal isapplied to the motor 434, the shape of the motor changes and its lengthgenerally expands. This change in shape increases the distance betweenthe support regions 458 as shown in FIG. 31B, which in connection withthe mechanical action of the linking struts 456 causes the tongue 433 tomove or rotate in a first direction with respect to the spring arms 452about the tracking axis. As shown, the lengthening of the motor 434stretches the gimbal 424 laterally and causes the struts 456 to bend(e.g., bow inward). Because of the offset arrangement of the struts 456,the struts 456 bend such that the tongue 433 rotates in the firstdirection.

When a second potential (e.g., negative) tracking drive signal isapplied to the motor 434, the shape of the motor changes and its lengthgenerally contracts. This change in shape decreases the distance betweenthe support regions 458 as shown in FIG. 31C, which in connection withthe mechanical action of the linking struts 456 causes the tongue 433 tomove or rotate in a second direction with respect to the spring arms 452about the tracking axis. The second direction is opposite the firstdirection. As shown, the shortening of the motor 434 compresses thegimbal 424 laterally and causes the struts 456 to bend (e.g., bowoutward). Because of the offset arrangement of the struts 456, thestruts 456 bend such that the tongue 433 rotates in the seconddirection. Some, although relatively little, out-of-plane motion ofother portions of the gimbal 424 is produced during the tracking actionas described above. With this embodiment of the invention the, flexureslider mounting region on the tongue 433 generally rotates with respectto the spring arms 452 as the spring arms 452 stay stationary orexperience little movement.

It is noted that the embodiments of FIGS. 1-31C show various DSAstructures that are actuated by a single motor. It will be understood,however, that multiple motors could alternatively be used in variousembodiments while utilizing aspects of the invention.

Embodiments of the invention offer important advantages. For example, insome cases they can significantly increase servo bandwidth (e.g., fromabout 3-4 kHz for baseplate or loadbeam based DSA structures to 5-8 kHzor more). Stroke can be increased. The DSA structures can be efficientlymanufactured.

Although the present invention has been described with reference topreferred embodiments, those skilled in the art will recognize thatchanges can be made in form and detail without departing from the spiritand scope of the invention. Various modifications and additions can bemade to the exemplary embodiments discussed without departing from thescope of the present invention. For example, while the embodimentsdescribed above refer to particular features, the scope of thisinvention also includes embodiments having different combinations offeatures and embodiments that do not include all of the above-describedfeatures.

1. A gimbaled flexure having a dual stage actuation (DSA) structure,comprising: a flexure comprising: a pair of spring arms; a tonguelocated between the spring arms and structurally supported by the pairof spring arms; and a pair of struts, the struts positioned respectivelybetween the pair of spring arms and the tongue, each strut connecting arespective one of the pair of spring arms to the tongue, the strutsorientated offset with respect to each other; a slider mounting; and amotor mounted on the flexure, a first one of the pair of struts distalof the motor while a second one of the pair of struts proximal of themotor, wherein electrical activation of the motor bends the pair ofstruts to rotate the tongue and the slider mounting about a trackingaxis.
 2. The gimbaled flexure of claim 1, wherein each of the springarms, the tongue, and the pair of struts are formed from a layer ofmetal.
 3. The gimbaled flexure of claim 1, wherein the flexure iscantilevered from a loadbeam and gimbaled about a dimple of theloadbeam.
 4. The gimbaled flexure of claim 1, wherein opposite ends ofthe motor are respectively mounted on the spring arms.
 5. The gimbaledflexure of claim 1, wherein the slider mounting is a surface on a firstside of the tongue and the motor is positioned on a second side of thetongue that is opposite the first side of the tongue.
 6. The gimbaledflexure of claim 1, further comprising a slider mounted on the slidermounting.
 7. The gimbaled flexure of claim 1, wherein the tongue rotatesand the pair of spring arms remain relatively stationary when the motoris electrically activated.
 8. The gimbaled flexure of claim 1, furthercomprising a loadbeam, the loadbeam comprising a dimple, wherein theflexure gimbals about the dimple, and the dimple impinges on the motor.9. The gimbaled flexure of claim 10, wherein an electrical connection ismade with a terminal on the motor through contact between the dimple andthe terminal.
 10. The gimbaled flexure of claim 1, wherein each of thepair of spring arms, the tongue, and the pair of struts are formed froma layer of metal, and the pair of struts is the only part of the layerof metal that connects the spring arms to the tongue.
 11. The gimbaledflexure of claim 1, wherein the slider mounting is a surface on themotor.
 12. A gimbaled flexure having a dual stage actuation (DSA)structure, comprising: a flexure comprising: a pair of spring arms; atongue located between the spring arms; and a pair of struts, the strutspositioned respectively between the pair of spring arms and the tongue,each strut connecting a respective one of the pair of spring arms to thetongue, wherein each of the pair of spring arms, the tongue, and thepair of struts are formed from a layer of metal, and the pair of strutsis the only part of the layer of metal that connects the spring arms tothe tongue; a slider mounting; and a motor mounted on the flexure, afirst one of the pair of struts distal of the motor while a second oneof the pair of struts proximal of the motor, wherein electricalactivation of the motor bends the pair of struts to rotate the tongueand the slider mounting about a tracking axis.
 13. The gimbaled flexureof claim 12, wherein the flexure is cantilevered from a loadbeam andgimbaled about a dimple of the loadbeam.
 14. The gimbaled flexure ofclaim 12, wherein opposite ends of the motor are respectively mounted onthe spring arms.
 15. The gimbaled flexure of claim 12, wherein theslider mounting is a surface on a first side of the tongue and the motoris positioned on a second side of the tongue that is opposite the firstside of the tongue.
 16. The gimbaled flexure of claim 12, furthercomprising a slider mounted on the slider mounting.
 17. The gimbaledflexure of claim 12, wherein the tongue rotates and the pair of springarms remain relatively stationary when the motor is electricallyactivated.
 18. The gimbaled flexure of claim 12, further comprising aloadbeam, the loadbeam comprising a dimple, wherein the flexure gimbalsabout the dimple, and the dimple impinges on the motor.
 19. The gimbaledflexure of claim 18, wherein an electrical connection is made with aterminal on the motor through contact between the dimple and theterminal.
 20. The gimbaled flexure of claim 12, wherein the slidermounting is a surface on the motor.